Surface Deformation of Metal Films Under Controlled Pressure for Generating Ultra-flat Metal Surfaces
Vj, Logeeswaran, Chan, Mei-Lin, Islam, M.Saif, Horsley, David A., Wu, Wei, Wang, Shih Yuan, Williams, R. StanleyVolume:
990
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0990-B08-22
Date:
January, 2007
File:
PDF, 1.85 MB
english, 2007