![](/img/cover-not-exists.png)
A Semiconductor-based Field-effect Platform for (Bio-)Chemical and Physical sensors: From Capacitive EIS Sensors and LAPS over ISFETs to Nano-scale Devices
Schöning, Michael J., Abouzar, Maryam H., Wagner, Torsten, Näther, Niko, Rolka, David, Yoshinobu, Tatsuo, Kloock, Joachim P., Turek, Monika, Ingebrandt, Sven, Poghossian, ArshakVolume:
952
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0952-F08-02
Date:
January, 2006
File:
PDF, 832 KB
english, 2006