Single-resonator dual-frequency AIN-on-Si MEMS oscillators

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2015 / 5 Vol. 62; Iss. 5

Single-resonator dual-frequency AIN-on-Si MEMS oscillators

Lavasani, Hossein Miri, Abdolvand, Reza, Ayazi, Farrokh
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Volume:
62
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
DOI:
10.1109/TUFFC.2015.007051
Date:
May, 2015
File:
PDF, 8.60 MB
english, 2015
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