Investigation on Fabricating High Aspect Ratio Microholes...

Advanced Materials Research 2012 / 12 Vol. 626

Investigation on Fabricating High Aspect Ratio Microholes on Silicon by FIB/SEM Milling

Jamaludin, Fatin Syazana, Mohd Sabri, Mohd Faizul
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Volume:
626
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.626.436
Date:
December, 2012
File:
PDF, 555 KB
english, 2012
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