Technology Computer Aided Design of Ultra-shallow Junctions in Si Devices Formed by Laser Annealing Processes
Magna, Antonino La, Alippi, Paola, Privitera, Vittorio, Fortunato, Guglielmo, Camalleri, Marco, Svensson, BengtVolume:
810
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-810-C5.5
Date:
January, 2004
File:
PDF, 268 KB
english, 2004