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Effects of High Dielectric Constant Abrasives on ECMP
Li, Wei Si, Guo, Dong Ming, Jin, Zhu Ji, Wang, Zhe, Yuan, Ze WeiVolume:
121-126
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.121-126.3263
Date:
October, 2011
File:
PDF, 359 KB
english, 2011