Surfactant Mediated Slurry Formulations for Ge CMP...

MRS Proceedings 2013 Vol. 1560

Surfactant Mediated Slurry Formulations for Ge CMP Applications

Basim, G. Bahar, Karagoz, Ayse, Chen, Long, Vakarelski, Ivan
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Volume:
1560
Year:
2013
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.971
File:
PDF, 1.97 MB
english, 2013
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