Oblique-Directional Plasma Etching of Si Using a Faraday...

Journal of The Electrochemical Society 2009 Vol. 156; Iss. 7

Oblique-Directional Plasma Etching of Si Using a Faraday Cage

Lee, Jin-Kwan, Lee, Seung-Haeng, Min, Jae-Ho, Jang, Il-Yong, Kim, Chang-Koo, Moon, Sang Heup
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Volume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3122623
File:
PDF, 524 KB
english, 2009
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