Precise Characterization of Silicon on Insulator (SOI) and...

MRS Proceedings 2003 / 1 Vol. 786

Precise Characterization of Silicon on Insulator (SOI) and Strained Silicon on Si1−xGex on Insulator (SSOI) Stacks with Spectroscopic Ellipsometry

Sun, Lianchao, Fouere, Jean-Claude
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Volume:
786
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-786-E6.9
Date:
January, 2003
File:
PDF, 169 KB
english, 2003
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