Characteristics of Dopant Activation by Sequential Lateral...

MRS Proceedings 2003 / 1 Vol. 785

Characteristics of Dopant Activation by Sequential Lateral Solidification (SLS)

Kim, Yong-Hae, Sohn, Choong-Yong, Chung, Choong-Heui, Ko, Young-Wook, Lee, Jin Ho
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Volume:
785
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-785-D10.3
Date:
January, 2003
File:
PDF, 1.11 MB
english, 2003
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