![](/img/cover-not-exists.png)
[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Inductively Coupled Ar/CCl2F4 /Cl2 Plasma Etching of Ge
Kim, Taek Sung, Choi, Sang-Sik, Jeong, Tae Soo, Kang, Sukill, Shim, Kyu-HwanVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2986759
File:
PDF, 426 KB
english, 2008