Electronic Properties of RF Glow Discharge Intrinsic...

MRS Proceedings 2004 / 1 Vol. 808

Electronic Properties of RF Glow Discharge Intrinsic Microcrystalline Silicon near the Amorphous Silicon Phase Boundary

Gutierrez, James J., Halverson, Adam F., Tweeten, Eric D., Cohen, J. David, Yan, Baojie, Yang, Jeffrey C., Guha, Subhendu
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Volume:
808
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-808-A8.9
Date:
January, 2004
File:
PDF, 157 KB
english, 2004
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