![](/img/cover-not-exists.png)
[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - The features of cold boron implantation in silicon
Vyatkin, A.F., Agafonov, Yu.A., Zinenko, V.I., Saraikin, V.V.Year:
2014
Language:
english
DOI:
10.1109/IIT.2014.6939960
File:
PDF, 179 KB
english, 2014