Direct measurement and modeling of the redirected ion flux...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2015 / 05 Vol. 33; Iss. 3

Direct measurement and modeling of the redirected ion flux in a high-powered pulsed-plasma magnetron

Meng, Liang, Yu, He, Sporre, John R., Raman, Priya, Szott, Matthew M., McLain, Jake T., Ruzic, David N.
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4914174
Date:
May, 2015
File:
PDF, 1.67 MB
english, 2015
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