Narrow size-distributed silicon cluster beam generated...

Chemical Physics Letters 2002 Vol. 358; Iss. 1-2

Narrow size-distributed silicon cluster beam generated using a spatiotemporal confined cluster source

Yasushi Iwata, Masaaki Kishida, Makiko Muto, Shengwen Yu, Tsuguo Sawada, Akira Fukuda, Toshio Takiya, Akio Komura, Koichiro Nakajima
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Volume:
358
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0009-2614(02)00556-0
File:
PDF, 218 KB
english, 2002
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