SPIE Proceedings [SPIE 27th Annual BACUS Symposium on...

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SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Resolution enhancement by aerial image approximation with 2D-TCC

Yamazoe, Kenji, Sekine, Yoshiyuki, Kawashima, Miyoko, Hakko, Manabu, Ono, Tomomi, Honda, Tokuyuki, Naber, Robert J., Kawahira, Hiroichi
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Volume:
6730
Year:
2007
Language:
english
DOI:
10.1117/12.746862
File:
PDF, 549 KB
english, 2007
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