A Monolithic MEMS Accelerometer Process
Li, Xiao Gang, Mei, Yong, Huang, Wen Gang, Zhang, Zheng Yuan, Li, Jian Gen, Feng, Zhi ChengVolume:
483
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.483.70
Date:
June, 2011
File:
PDF, 314 KB
english, 2011