Dislocation Generation in Device Fabrication Process

Mica, Isabella, Polignano, Maria Luisa, Carnevale, G.P., Armigliato, A., Balboni, R., Brambilla, M., Cazzaniga, F., Pavia, G., Soncini, V.

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Volume:

95-96

Year:

2004

Language:

english

Journal:

Solid State Phenomena

DOI:

10.4028/www.scientific.net/SSP.95-96.439

File:

PDF, 315 KB

english, 2004

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