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A theoretical investigation on the mechanism and kinetics for the reaction of SiH2Cl2 with atomic O (3P)
Qingzhu Zhang, Shaokun Wang, Yueshu GuVolume:
369
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0009-2614(02)01996-6
File:
PDF, 196 KB
english, 2003