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Cellular Automation for the Self-Organization Processes at the Annealing of Silicon Rich Oxide Layer
Orlov, O. M., Matyushkin, I. V., Korobov, S. V., Krasnikov, G. Y.Volume:
45
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/04510.0001ecst
Date:
March, 2013
File:
PDF, 525 KB
english, 2013