Fabrication of patterned domains with graphitic clusters in amorphous carbon using a combination of ion implantation and electron irradiation techniques
Iwamura, Eiji, Aizawa, TatsuhikoVolume:
908
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0908-OO11-05
Date:
January, 2005
File:
PDF, 358 KB
english, 2005