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Impact of Buffered Layer Growth Conditions on Grown-In Vacancy Concentrations in Molecular Beam Epitaxy Silicon Germanium
Shoukri, Kareem M., Haddara, Yaser M., Knights, Andrew P., Coleman, Paul G., Rahman, Mohammad M., Tatsuyama, C.C.Volume:
809
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-809-B9.2.1/C9.2
Date:
January, 2004
File:
PDF, 136 KB
english, 2004