Characterization of (Ti, Al) N Films Synthesized by Arc Ion...

Advanced Materials Research 2007 Vol. 26-28

Characterization of (Ti, Al) N Films Synthesized by Arc Ion Plating

Choi, Se Weon, Kim, Young Chan, Chang, Se Hun, Oh, Ik Hyun, Kang, Chang Seog
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Volume:
26-28
Year:
2007
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.26-28.641
File:
PDF, 4.51 MB
english, 2007
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