Effects of Suspending Abrasives on the Lubrication...

Effects of Suspending Abrasives on the Lubrication Properties of Slurry in Chemical Mechanical Polishing of Silicon Wafer

Liu, J.Y., Jin, Zhu Ji, Guo, Dong Ming, Kang, Ren Ke
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Volume:
304-305
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.304-305.359
File:
PDF, 315 KB
english, 2006
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