The Effect of Plasma Treatment on the SiO2 film fabricated...

MRS Proceedings 2008 / 1 Vol. 1078

The Effect of Plasma Treatment on the SiO2 film fabricated without Substrate Heating for Flexible Electronics

Kim, Sun-Jae, Han, Sang-Myeon, Kuk, Seung-Hee, Kang, Dong-Won, Han, Min-Koo
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Volume:
1078
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1078-M08-03
Date:
January, 2008
File:
PDF, 241 KB
english, 2008
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