Electrical Impact of the Aluminum P-Implant Annealing on...

Materials Science Forum 2013 / 1 Vol. 740-742

Electrical Impact of the Aluminum P-Implant Annealing on Lateral MOSFET Transistors on 4H-SiC N-Epi

Noll, Stefan, Scholten, Dick, Grieb, Michael, Bauer, Anton J., Frey, Lothar
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.521
Date:
January, 2013
File:
PDF, 307 KB
english, 2013
Conversion to is in progress
Conversion to is failed