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Plasma Polymerized Highly Hydrophobic Hexamethyldisiloxane Layers: Investigation on the Effect of Monomer Flow Rate Related to the Film Gas Sensing Properties
Boutamine, M., Lezzar, O.C., Bellel, A., Sahli, Salah, Segui, Y., Raynaud, PatriceVolume:
605
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.605.275
Date:
April, 2014
File:
PDF, 649 KB
english, 2014