Thermal Modification of Nanoscale Mask Openings in...

MRS Proceedings 2014 Vol. 1663

Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers

Riedl, Thomas, Strake, Matthias, Sievers, Werner, Lindner, Joerg K.N.
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Volume:
1663
Year:
2014
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2014.312
File:
PDF, 6.38 MB
english, 2014
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