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Low Temperature Deposition of Si-based Thin Films on Plastic Films Using Pulsed-Discharge PECVD under Near Atmospheric Pressure
Matsumoto, Mitsutaka, Inayoshi, Yohei, Suemitsu, Maki, Nakajima, Setsuo, Uehara, Tsuyoshi, Toyoshima, YasutakeVolume:
1066
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1066-A05-05
Date:
January, 2008
File:
PDF, 2.40 MB
english, 2008