High Rate Silicon Carbide Polishing to Ultra-smooth...

MRS Proceedings 2007 / 1 Vol. 991

High Rate Silicon Carbide Polishing to Ultra-smooth Surfaces

White, Michael, Moeggenborg, Kevin, Batllo, Francois, Gilliland, Jeffrey, Naguib, Nevin
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Volume:
991
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0991-C07-02
Date:
January, 2007
File:
PDF, 1.33 MB
english, 2007
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