On the Influence of Doping and Annealing on Oxygen-Related...

Materials Science Forum 1986 Vol. 10-12

On the Influence of Doping and Annealing on Oxygen-Related Defects in Silicon

Mascher, Peter, Dannefaer, S., Kerr, D., Hahn, S.K.
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Volume:
10-12
Year:
1986
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.10-12.869
File:
PDF, 318 KB
1986
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