A Study of a Single-Wafer Process in Metal Contact Hole...

Solid State Phenomena 2008 Vol. 134

A Study of a Single-Wafer Process in Metal Contact Hole Cleaning

Park, Jae Yong, Song, Jong Kook, Kim, Han Mil, Cho, Hee Kang, Kim, Tae Gyun, Moon, Bong Ho, Rho, Eun Su, Archer, Leo, Cho, Won Ho
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Volume:
134
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.134.177
File:
PDF, 1.82 MB
english, 2008
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