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Influence of Interfacial Neighborhood on Residual Stress due to Deposition of TiN Thin Films Made by PVD
Hirose, Hajime, Suzuki, Shinya, Gotoh, Masahide, Sasaki, ToshihikoVolume:
490-491
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.490-491.601
File:
PDF, 407 KB
english, 2005