![](/img/cover-not-exists.png)
Gettering Strategies for SOI Wafers
Istratov, Andrei A., Huber, W., Weber, Eicke R.Volume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.547
File:
PDF, 227 KB
english, 2004