The Effects of Current Type and Density on Dishing...

Solid State Phenomena 2007 Vol. 124-126

The Effects of Current Type and Density on Dishing Phenomena in CMP Process

Cho, Woong, Ko, Yong Jun, Ahn, Yoo Min, Chang, Gun Ho, Lee, Jae Ho
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Volume:
124-126
Year:
2007
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.124-126.307
File:
PDF, 2.07 MB
english, 2007
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