Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control
Yun, Cheol Ho, Kim, Wan Soo, Cha, Hyun Rok, Jung, Tea Uk, Lee, Sun KyuVolume:
368-372
Year:
2008
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.368-372.204
File:
PDF, 393 KB
english, 2008