Microstructural Investigations of Hafnium Aluminum Oxide Films
Craciun, Doina, Socol, Gabriel, Axente, Emanuel, Galca, Aurelian-Catalin, Singh, Rajiv, Craciun, ValentinVolume:
1074
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1074-I03-18
Date:
January, 2008
File:
PDF, 243 KB
english, 2008