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New designs of hydrophobic and mesostructured Ultra Low k materials with isolated mesopores
Grunenwald, Anthony, Ayral, André, Albouy, Pierre Antoine, Rouessac, Vincent, Jauffres, David, Verdier, Marc, Gergaud, Patrice, Licitra, Christophe, Zenasni, Aziz, Jousseaume, Vincent, Simon, Jean-PauVolume:
1335
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.853
Date:
January, 2011
File:
PDF, 1.13 MB
english, 2011