On a Particle-Augmented Mixed Lubrication Approach to Predicting CMP
Higgs, C. Fred, Terrell, Elon J, Kuo, Michael, Bonivel, Joseph, Biltz, SarahVolume:
991
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0991-C13-01
Date:
January, 2007
File:
PDF, 469 KB
english, 2007