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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability
Senkal, D., Ng, E.J., Hong, V., Yang, Y., Ahn, C.H., Kenny, T.W., Shkel, A.M.Year:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7050878
File:
PDF, 1.40 MB
english, 2015