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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors
Dellea, Stefano, Giacci, Federico, Longoni, Antonio, Rey, Patrice, Berthelot, Audrey, Langfelder, GiacomoYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7050880
File:
PDF, 3.26 MB
english, 2015