[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Post-release stress-engineering of surface-micromachined MEMS structures using evaporated Chromium and in-situ fabricated reconfigurable shadow masks
Majumdar, Ratul, Foroutan, Vahid, Paprotny, IgorYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7050947
File:
PDF, 2.27 MB
english, 2015