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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A three-step model of black silicon formation in Deep Reactive Ion Etching process
Zhu, Fuyun, Wang, Chen, Zhang, Xiaosheng, Zhao, Xin, Zhang, HaixiaYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7050965
File:
PDF, 1.52 MB
english, 2015