[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Stiction forces and reduction by dynamic contact in ultra-clean encapsulated MEMS devices
Heinz, D.B., Hong, V.A., Kimbrell, T.S., Stehle, J., Ahn, C.H., Ng, E.J., Yang, Y., Yama, G., O'Brien, G.J., Kenny, T.W.Year:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7050972
File:
PDF, 2.83 MB
english, 2015