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Dielectric Properties of HfO2 Films Prepared on Flexible Polymer Substrates Using UV Irradiation
Suzuki, Kazuyuki, Kato, KazumiVolume:
445
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.445.164
Date:
July, 2010
File:
PDF, 397 KB
english, 2010