Plasma-Surface Interactions and Processing of Materials || Basic Physics of Plasmas/Discharges: Production of Active Species
Auciello, Orlando, Gras-Marti, Alberto, Valles-Abarca, Jose Antonia, Flamm, Daniel L.Volume:
10.1007/97
Year:
1990
Language:
english
DOI:
10.1007/978-94-009-1946-4_1
File:
PDF, 2.41 MB
english, 1990