![](/img/cover-not-exists.png)
[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Preparation of Iridium Thin Film by Pulse CVD from Ir(acac)(CO)
Semyannikov, Pyotr P., Morozova, Natalia B., Zherikova, Kseniya V., Trubin, Sergey V., Igumenov, Igor K., Gelfond, Nikolay V.Year:
2009
Language:
english
DOI:
10.1149/1.3207682
File:
PDF, 395 KB
english, 2009