Nano-hardness estimation by means of Ar+ ion etching

Nano-hardness estimation by means of Ar+ ion etching

Bartali, R., Micheli, V., Gottardi, G., Vaccari, A., Safeen, M.K., Laidani, N.
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Volume:
589
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.05.023
Date:
August, 2015
File:
PDF, 464 KB
english, 2015
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