Diagnostic Experiment and Kinetic Model Analysis of...

Diagnostic Experiment and Kinetic Model Analysis of Microwave $\bf CH_{4}/H_{2}$ Plasmas for Deposition of Diamondlike Carbon Films

Tahara, Hirokazu, Minami, Ken-ichiro, Murai, Akira, Yasui, Toshiaki, Yoshikawa, Takao
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.1972
Date:
April, 1995
File:
PDF, 1.25 MB
1995
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