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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Thin-film edge electrode lithography enabling low-cost collective transfer of nanopatterns
Li, Yongfang, Goryu, Akihiro, Chen, Kunhan, Toshiyoshi, Hiroshi, Fujita, HiroyukiYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051015
File:
PDF, 2.55 MB
english, 2015